
TEM & SEM Plasma Cleaner - for specimen & holder cleaning
Our low-cost plasma cleaners/plasma ashers for TEM sample holders are designed specifically for fast and efficient cleaning.
Henniker specialises in advanced, compact plasma cleaners that deliver precision surface cleaning for electron microscopy applications, ensuring reduced contamination and sharper, more reliable results.
Our versatile systems are compatible with major TEM and SEM sample holders, offering fully automated control and gentle, low-power operation. Experience increased measurement stability, minimised common sources of error, and simplified sample preparation backed by robust, user-friendly technology that adapts to your research needs.
A compact, benchtop format, the HPT-100 is a fully automated, programmable device with standard adapters suitable for TEM specimen holders from all the major microscope manufacturers. The plasma output power is fully variable over the range 0-l00W (0-200W option), allowing gentle cleaning that can handle both ultra-thin carbon and graphene grids as well as bulk carbon deposition removal after STEM imaging.

TEM Plasma Cleaner / Plasma Asher options:
The TEM plasma cleaner/plasma asher is an application-specific solution for low-pressure plasma cleaning and preparation of electron microscopy samples, including:
- Plasma cleaning
- Low power operation
- A front-feed TEM sample holder
- Integral TEM holder vacuum storage manifold
- Multiple TEM grids and SEM stub cleaning
- Re-entrant style sample holder introduction
- Dual gas inlets for O2/Ar and other gases
- Recipe store and recall
Process Control
Repeatable & Reliable

With precision digital mass flow controllers and an integrated pressure gauge, the HPT-100 TEM delivers unmatched reliability and repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves. Convenient recipe store software, a unique feature, allows fixed repeatability.
Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single key press. A handy status display and end-of-process audible alarm informs the user of every step in the process.
Plasma Environment
Vacuum chamber, power and sample holders

The HPT-100 TEM features a 100mm (150mm option) diameter plasma process chamber in stainless steel with vacuum-compatible materials throughout.
Our proprietary, high-stability HPS plasma generator is continuously variable over the entire 0-l00W (0-200W option) power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.
Specifications
| Technical Specifications |
||||||
| HPT-100 / HPT-200 TEM Plasma Cleaners | ||||||
| ENCLOSURE | ||||||
| Dimensions | HPT-100 / HPT-200 - W 520mm x H 286mm x L 550mm (+50mm on rear for cables) | |||||
| Weight |
HPT-100 - ~22kg HPT-200 - ~23kg |
|||||
| CHAMBER | ||||||
| Material | Stainless Steel | |||||
| Form | Cylindrical | |||||
| Dimensions |
HPT-100 - 100mm dia. x 280mm L HPT-200 - 150mm dia. x 280mm L |
|||||
| REMOVABLE PARTS CARRIER | ||||||
| Material | Aluminium | |||||
| Material options | Stainless steel | |||||
| Form | Flat tray | |||||
| Form options | Perforated tray, others to suit application | |||||
| Dimensions |
HPT-100 - 90mm W x 255mm L, others to suit application HPT-200 - 135mm W x 255mm L, others to suit application |
|||||
| PLASMA POWER SUPPLY | ||||||
| Power |
HPT-100 - 0-100W, continuously variable output HPT-200 - 0-200W, continuously variable output |
|||||
| Frequency | 40 kHz | |||||
| PROCESS CONTROL | ||||||
| Interface | 5.7” Colour TFT with recipe store | |||||
| Gas channels | x2 Mass Flow Controllers | |||||
| Gas channel options | x1 vapour inlet | |||||
| Vent inlet | x1 | |||||
| Vent inlet options | soft ventilation option | |||||
| Connections | 6mm compression or 1/4" compression | |||||
| Process timer | 1sec – 99.59min | |||||
| Recipe Store | Stores up to 4 x recipes - for power level, and process time | |||||
| Pressure gauge | Pirani sensor | |||||
| Vacuum pump | 3 to 6 m3/hr pumping speed | |||||
| Vacuum pump options | 2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections | |||||
| Sample holder adapter | Includes one adapter suitable for either JEOL or FEI instruments, others on application | |||||
| Vacuum storage manifold | Optional - up to 5 x vacuum sample storage units | |||||
| SERVICES | ||||||
| Electrical | 90-250 VAC, 50-60Hz, 1200-1500 VA (including pump), fused 6.3 A T / 10 A T | |||||
| Power cord | Suited to region | |||||
| Compliance | CE – UKCA - ROHS - WEEE | |||||
|
**Henniker strive for continuous improvement and specifications are subject to change without notice |
||||||
Product Brochure
Installation 'The Bridge'
Research in Advanced Materials

Review our Knowledge Article - Case Study 'Henniker Plasma Enhancing Research Capabilities at The Bridge with the TEM Plasma Cleaner ' .
The Bridge, a leading research hub at the University of Lincoln, collaborates with industry partners to advance materials science and engineering solutions. Recognising the need for precise and reliable sample preparation, The Bridge chose Henniker Plasma's HPT-100 TEM Plasma Cleaner to enhance its electron microscopy capabilities.
Application - Holey Carbon Film
Effectiveness on Holey Carbon Film

Review our Knowledge Article - Application Note 'Examination of Effectiveness of Henniker Plasma Cleaner using a Holey Carbon Film by TEM ' for typical process results and detailed SEM/TEM images.
Henniker HPT-100 Plasma Cleaner with JEOL TEM sample holder adapter. Continuously variable power output from 0-100W and dual digital MFC gas mixing. Samples were introduced via the front feedthrough adapter and cleaned with Ar:O2 95:5 mixture at low power (20W and 50W) in 30sec time steps.
Application - Hydrocarbon Build-up
Reducing Contamination Build-up During Analyses


In-situ at TEM lab
Researchers at the SCL, Goethe University Frankfurt. investigating delicate planetary materials, including meteorites and cometary samples, rely on the Henniker Plasma Cleaner to eliminate contamination and preserve sample integrity during high-resolution imaging.
In one case, hydrocarbon build-up was observed on a lacey carbon film when imaging a C-Pt-Cr material without plasma cleaning. Subsequent plasma treatment removed the contamination, enabling uninterrupted STEM analysis. Similarly, contamination from EDS scans on meteorite samples was prevented by pre-cleaning, allowing for multiple analyses of the same region without degradation.
Users describe the Henniker Plasma Cleaner as invaluable for contamination-free imaging, improving analytical efficiency and precision in unique and irreplaceable materials research.
"The Henniker Plasma Cleaner is very user friendly, which is perfect for a university lab setting where we have many users with varying levels of expertise."
Dr. Sheryl A. Singerling, TEM Lab Manager, Schwiete Cosmochemistry Laboratory - SCL, Goethe University Frankfurt.
Relevant Plasma Treatments
Knowledge Articles
Press Releases
Videos
Plasma Cleaning Explained
Plasma Cleaning Explained.
The third in our series of videos about plasma treatment technology, this video explains how plasma cleaning works and which systems can provide the best quality treatments.













